| 摘要 |
PROBLEM TO BE SOLVED: To provide an extremely-miniature and high-sensitivity vibration sensor for detecting a vibration component in a specific direction. SOLUTION: This vibration sensor 100 is formed as a semiconductor board by integrating a frame 11 with a rocking body 13 supported through two support beams 12, 12 and is equipped with an outside output means 4 driven optically relative to a rotational angle of the rocking body 13 or driven by electromotive force of a rotational speed. Preferably, the sensor 100 is composed of a voltage induction coil 41 formed by a printed wiring on the circumference part of the rocking body 13 and a permanent magnet formed on an active part thereof, and is arranged so that the active part of the voltage induction coil 41 will be parallel to a support shaft of the rocking body 13, and the direction of magnetic flux of the permanent magnet is made to cross at right angles with the active part of the voltage induction coil 41 and with the support shaft of the rocking body 13. Otherwise, the sensor 100 has a reflecting mirror formed by metal vaporization or lamination on the support shaft on the rocking body 13 surface. Besides, the support beam 12 is only one and the width thereof is made wider than the thickness thereof. |
