| 摘要 |
PROBLEM TO BE SOLVED: To suppress vibration when a movable frame is decelerated, stopped or the like, relatively simply constitute a control system in particular, and effectively exercise corrective control for vibration suppression with favorable response. SOLUTION: A mobile frame for holding a working member is driven by a pair of motors 21 and 22 through a pair of feed screws, the pair of the motors 21 and 22 being controlled by a speed command generating means 32, a current command generating means 33 and a pair of current controlling means 34 and 35. In addition, the control device is provided with a calculating means 36 for calculating a difference in speed between the pair of the motors 21 and 22, and a current command correcting means 37 for performing correcting operation according to a speed difference calculated by the calculating means 36 so that a current command value given to the current control portions 34 and 35 is provided with a deviation. |
