| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a jig which can be repeatedly used without reforming an adhesive layer after used, by using a polymer material having the glass transition temp. in a specified temp. range for the adhesive layer. SOLUTION: An adhesive layer 3 to adhere and hold a pellicle film is formed on a supporting frame 2 around an opening 1. The adhesive layer 3 may be directly formed on the supporting frame 2. Or, if the adhesion property between the material of the supporting frame 2 and the adhesive layer 3 is not good, a binder may be formed to adhere the supporting frame 2 and the adhesive layer 3. The adhesive layer 3 formed around the opening 1 consists of a polymer material having the glass transition temp. in the range from 0 to 300 deg.C. By forming the adhesive layer 3 from the polymer material having the glass transition temp. in the range of 0 to 300 deg.C, the pellicle film and the adhesive layer 3 can be melt-adhered by heating the layer to a temp. higher than the glass transition temp. and then bringing the film into contact with the adhesive layer and pressurizing.</p> |
