| 摘要 |
PROBLEM TO BE SOLVED: To make fine foreign matter, etc., easily visible, to improve the detection accuracy of the defect of a substrate formed with plural thin-film transistors(TFTs) on a transparent substrate in a TFT forming stage and eventually to improve the yield of electronic parts, to improve reliability and productivity and to reduce a cost by oscillatably supporting this substrate and observing the substrate by using reflected light and transmitted light. SOLUTION: The transparent substrate 11 formed with the TFTs is attracted and fixed onto an oscillation stage 12 by a holder and a vacuum port. A reflection illumination device 17 and a transmission illumination device 18 are thereafter lighted. While an operator oscillates the oscillation stage 12 in an arrow (t) direction or (v) direction by manipulating a joystick 16 at need, the operator visually observes the reflected light and transmitted light from the substrate 11 by the reflection illumination device 17 and the transmission illumination device 18 at various visual field angles and detects the foreign matter and defect on the substrate 11. When the observer detects the foreign matter, etc., the operator turns off the transmission illumination device 18 and carries out the segmentation as to whether the foreign matter, etc., are on the front surface side or rear surface side of the substrate 11.
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