| 摘要 |
PROBLEM TO BE SOLVED: To provide an opening structure of a vacuum chamber without dropping an O-ring at the time of opening a cover after pressurizing it to an atmospheric pressure or more. SOLUTION: In the opening structure of a vacuum chamber comprising a groove 13 provided on a peripheral edge of an opening 11 of the chamber 1 to be pressurized to an atmospheric pressure or more, an O-ring 2 arranged in the groove 13, and a door 3 brought into pressure contact with the ring 2 at the time of the atmospheric pressure or less of the chamber 1 to close the opening 11 of the chamber 1; a communicating passage 14 is provided to communicate a space behind the ring 2 in the groove 13 with the chamber 1.
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