| 摘要 |
PROBLEM TO BE SOLVED: To treat by illuminating an ultraviolet ray with ozone of a specific concentration in a short time by treating while heating a sample formed with an oxide insulating film at a specific temperature, thereby reducing a leakage current necessary as insulating film characteristics. SOLUTION: A capacitor using a tantalum oxide film has a structure in which a Ta2O5 of an insulating film is vapor deposited on a lower electrode of a poly-Si by a CVD, annealed and then an upper electrode of a TiN is formed. A low pressure mercury vapor lamp 4 for mainly radiating rays having 185 and 254 nm of wavelengths is disposed in an upper lamp chamber of an annealing room, gas piping 9 is connected to a nozzle hole of an ultraviolet transmission glass from an exterior via the lamp chamber, and ozone of a high concentration generated by an ozonizer is supplied to the annealing room. The annealing temperature in the case of annealing is 350 (for 10 min) to 600 deg.C (for 5 min), and the ozone concentration is set to a range of 10 to 200 g/m2. After the annealing, the ozone is switched to nitrogen, and the film is naturally cooled to 300 deg.C, and taken out of the room. |
