| 摘要 |
PROBLEM TO BE SOLVED: To efficiently release the heat of a rotary vane by improving the thermal conduction efficiency of the internal part of a pump, to increase the allowable pressure of an intake port and an exhaust port, and to improve performance of a pump by effecting assembly that the contact surfaces of a fixed vane and a fixed vane spacer squeeze each other. SOLUTION: A rotary vane 2 is driven and rotated by a motor 3 even with the rotary vane floated by a magnetic bearing 4. A plurality of fixed vanes 20 are arranged with a slight gap between the rotary vane 2 and the fixed vane. The outer peripheral end of the fixed vane 20 is inserted between fixed vane spacer 22, and an outer cylinder 24 is fixed on the outer periphery of the fixed vane space 22 with a slight gap 23. The lower part of the outer cylinder 24 is fixed at a base part 10, incorporating the motor 3 and the magnetic bearing 4, with a gap therebetween. Gas molecules sucked through a suction port 1 are struck down by the rotary vanes 2 and exhausted through an exhaust port 11. In this case, the contact surfaces of the fixed vane 20 and the fixed vane spacer 22 are assembled in a manner to squeeze each other. This constitution adheres the two vanes 20 and 22 to each other and improve thermal conductivity.
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