| 摘要 |
PROBLEM TO BE SOLVED: To continuously carry out oxidization, diffusion, and CVD treatments, using one heat treatment apparatus. SOLUTION: A plurality of treating bodies (W) are stored using a holding jig 5 into a reaction tube with an opening 2 on the lower end, a gas inlet opening 3 on a sidewall, and an exhaust opening 4 on the sidewall. The opening 2 on the lower end is covered with a non-metallic cover 6 having heat and corrosion resistances for carrying out a given heat treatment step. A gas introducing system 18 is joined to the gas inlet opening 3 and a pressure-reducible exhaust system 19 is joined to the exhaust opening 4 via a first sealing means 20 having an O-ring which is not exposed to the inside. In addition, a second sealing means 48 other than the O-ring is provided between the opening 2 and the cover body 6.
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