| 摘要 |
PROBLEM TO BE SOLVED: To avoid causing defects in separating laminated substrates having separating layers inside. SOLUTION: A first (peripheral) region and second (central) region of a laminated substrate 101 having a porous layer 101b inside are separated by a jet and ultrasonic wave, respectively, i.e., the first region is separated by a jet from a nozzle with the laminated substrate 101 being rotated and the second region is separated by an ultrasonic wave generated from an ultrasonic oscillator 203.
|
