| 摘要 |
PROBLEM TO BE SOLVED: To obtain an angular speed sensor having novel structure for detecting angular speed accurately. SOLUTION: In an SOI substrate produced by forming a silicon layer on a silicon substrate 2 through an insulating layer, through holes 7a-7d are made in the silicon substrate 2 and a movable structure 9 having beams 11a-11d is sectioned. The movable structure 9 oscillates in Y direction parallel with the surface of the silicon substrate 2. A thin movable film 13 is supported on the movable structure 9 at a specified interval in Z direction perpendicular to the surface of the silicon substrate 2 and counter electrodes for angular speed detection are constituted of the thin movable film 13 and the movable structure 9. A wiring 27 extends on the thin movable film 13 and the movable structure 9 is oscillated by Lorentz force generated through action of a current flowing through the wiring 27 and the field of a permanent magnet disposed above the substrate 1. |
