| 摘要 |
PROBLEM TO BE SOLVED: To simplify and miniaturize constitution and improve productivity and maintainability. SOLUTION: This measuring microscope is equipped with a movable stage 2 moving a mounting member 21 mounting an object to be measured in the directions of rectangular X, Y axes, an X axis movement amount detecting means 11 detecting the amount of movement in the X axis direction, a Y axis movement amount detecting means 12 detecting the amount of movement in the Y axis direction, an optical system unit 3 magnifying an incident image from an objective 31, a distance adjusting mechanism 2 changing and adjusting the distance from the objective 31 to the mounting member 21, a Z axis movement amount detecting means 13 detecting the amount of distance change from the objective 31 to a mounting surface, a light receiving means 14 receiving a magnified incident image, an image control means 5 outputting an image signal according to an output from the light receiving means 14, a display unit 6 displaying a magnified image, and a pedestal 15 on which each constitution is installed. A display unit retaining means 7 is installed and supports the display unit 6 in such a manner that inclination and vertical movement are freely enabled.
|
