发明名称 DISPOSITIF COMPORTANT DES COMPOSANTS ELECTRONIQUES DANS DES REGIONS MUTUELLEMENT INSOLEES D'UNE COUCHE DE MATERIAU SEMI-CONDUCTEUR ET PROCEDE DE FABRICATION D'UN TEL DISPOSITIF
摘要 The invention concerns a method for making a device comprising electronic components (20a, 20b) in regions (32a, 32b) of a semiconductor material layer (12), said regions being mutually insulated. The method is characterised in that it comprises the following steps: a) forming electronic components (30) of the regions of a semiconductor material layer (12) formed by an electrically insulating layer (14); b) forming trenches passing right through the semiconductor material layer (12) so as to separate the regions (32a, 32b); c) filling up the trenches (30) with a fluid filling material; and d) hardening said filling material. The invention is useful for making integrated circuits comprising power components.
申请公布号 FR2782842(A1) 申请公布日期 2000.03.03
申请号 FR19980010686 申请日期 1998.08.25
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 GIFFARD BENOIT;GIDON PIERRE
分类号 H01L21/762 主分类号 H01L21/762
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