| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a flow sensor, a temperature sensor and a flow rate- detecting apparatus in which a response speed of the flow sensor, the temperature sensor is more increased, a measurement accuracy is more enhanced and the problem of corrosion, deformation of a fin plate is solved. SOLUTION: A flow sensor 1 comprises a substrate 3 of a material of a high thermal conductivity and superior electric insulating properties, a flow rate-detecting part 2 having a heat-generating body and a temperature-sensing body directly formed to one end part of the substrate 3, and output terminals 4. A part of the substrate 3 and a part of the output terminals 4 are coated with a coating member 5 by molding. The temperature sensor consists of a substrate 23 of a material of a high thermal conductivity and superior electric insulating properties, a temperature-detecting part 22 having a temperature- sensing body directly formed to one end part of the substrate 23, and output terminals 24. A part of the substrate 23 and a part of the output terminals 24 are coated with a coating member 25 by molding.</p> |
