| 摘要 |
PROBLEM TO BE SOLVED: To quickly specify a manufacturing process which causes dust by using distinctive material for a substrate cassette used for storing substrates in each manufacturing process for assembling devices on a substrate to specify the material of the abrasion powder of the substrate cassette when dust is detected. SOLUTION: A substrate cassette is constituted of substrate supporting beams 1 constituted of projecting sections for supporting substrates 7 stored inside and substrate stoppers 2 for stopping the ends of the stored substrates. The substrate supporting beams 1 and the substrate stoppers 2 are in contact mainly with the stored substrates 7. On the other side, side face covers 3, a top plate 4 and a bottom plate 5, all for protecting the substrate cassette, are in contact with storage alignment jigs 6. As the material for the substrate cassette, ethylene vinyl alcohol resin is used in a pretreatment process, and polyether imide resin is used in an aftertreatment process. As a result, when dust is detected, the material of the abrasion powder can be quickly analyzed to remove the cause for contamination quickly. |
