| 摘要 |
PROBLEM TO BE SOLVED: To improve the uniformity in a gap plane, gap accuracy and alignment accuracy and to provide a liquid crystal display element which is capable of making high-grade display by executing the alignment and gap control of a pair of substrates with the same stage. SOLUTION: The substrate bonding device has a pair of upper and lower surface plates 9, 10 and a recognition camera (not shown in Fig.) within a vacuum vessel 8. The substrate 2a dropped with liquid crystals installed on the lower surface plate 10 and the other substrate 2b is attracted to an electrostatic chuck 11 disposed on the upper surface plate 9. The inside of the vacuum vessel 8 is maintained under a prescribed pressure and while the upper and lower plates 9, 10 are pressurized the substrates 2a, 2b are bonded and the markers previously formed on the substrates 2a, 2b are aligned. The inside of the vacuum vessel 8 is then restored to the atm. pressure. Only the sealing material between both substrates 2a and 2b is thereafter irradiated with UV rays.
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