发明名称 |
DEVICE COMPRISING ELECTRONIC COMPONENTS IN MUTUALLY INSULATED REGIONS OF A SEMICONDUCTOR MATERIAL LAYER AND METHOD FOR MAKING SAME |
摘要 |
The invention concerns a method for making a device comprising electronic components (20a, 20b) in regions (32a, 32b) of a semiconductor material layer (12), said regions being mutually insulated. The method is characterised in that it comprises the following steps: a) forming electronic components (30) of the regions of a semiconductor material layer (12) formed by an electrically insulating layer (14); b) forming trenches passing right through the semiconductor material layer (12) so as to separate the regions (32a, 32b); c) filling up the trenches (30) with a fluid filling material; and d) hardening said filling material. The invention is useful for making integrated circuits comprising power components. |
申请公布号 |
WO0011711(A1) |
申请公布日期 |
2000.03.02 |
申请号 |
WO1999FR02032 |
申请日期 |
1999.08.24 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE;GIFFARD, BENOIT;GIDON, PIERRE |
发明人 |
GIFFARD, BENOIT;GIDON, PIERRE |
分类号 |
H01L21/762 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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