发明名称 DEVICE COMPRISING ELECTRONIC COMPONENTS IN MUTUALLY INSULATED REGIONS OF A SEMICONDUCTOR MATERIAL LAYER AND METHOD FOR MAKING SAME
摘要 The invention concerns a method for making a device comprising electronic components (20a, 20b) in regions (32a, 32b) of a semiconductor material layer (12), said regions being mutually insulated. The method is characterised in that it comprises the following steps: a) forming electronic components (30) of the regions of a semiconductor material layer (12) formed by an electrically insulating layer (14); b) forming trenches passing right through the semiconductor material layer (12) so as to separate the regions (32a, 32b); c) filling up the trenches (30) with a fluid filling material; and d) hardening said filling material. The invention is useful for making integrated circuits comprising power components.
申请公布号 WO0011711(A1) 申请公布日期 2000.03.02
申请号 WO1999FR02032 申请日期 1999.08.24
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;GIFFARD, BENOIT;GIDON, PIERRE 发明人 GIFFARD, BENOIT;GIDON, PIERRE
分类号 H01L21/762 主分类号 H01L21/762
代理机构 代理人
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