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发明名称
HEATER TABLE
摘要
申请公布号
KR200173796(Y1)
申请公布日期
2000.03.02
申请号
KR19940026600U
申请日期
1994.10.12
申请人
HYUNDAI MICRO ELECTRONICS CO., LTD.
发明人
CHOI, DU-KYU
分类号
H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
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