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发明名称
ION TRAPPER OF WAFER STRIP APPARATUS
摘要
申请公布号
KR200173010(Y1)
申请公布日期
2000.03.02
申请号
KR19970033398U
申请日期
1997.11.22
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
KIM, HEA-DONG
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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