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发明名称
EXPOSURE APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR200170306(Y1)
申请公布日期
2000.03.02
申请号
KR19940033974U
申请日期
1994.12.14
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
CHO, CHAN-SUP;KIL, MYOUNG-KUN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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