发明名称 LASER REPETITION RATE MULTIPLIER
摘要 Apparatus for producing high repetition rate optical pulses, including: a beam generator that produces an initial pulsed light beam having an initial pulse repetition rate; a pulse repetition rate multiplier, which receives the initial pulsed light beam and produces at least one pulsed light beam having a higher pulse repetition rate than the initial rate.
申请公布号 WO0011766(A1) 申请公布日期 2000.03.02
申请号 WO1998IL00398 申请日期 1998.08.20
申请人 ORBOTECH LTD.;KATZIR, YIGAL;KLING, BORIS;FENSTER, PAUL 发明人 KATZIR, YIGAL;KLING, BORIS;FENSTER, PAUL
分类号 G02B27/10;G03F7/20;H01L21/027;H01S3/00;H01S3/10;H05K3/00 主分类号 G02B27/10
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