发明名称 |
LASER REPETITION RATE MULTIPLIER |
摘要 |
Apparatus for producing high repetition rate optical pulses, including: a beam generator that produces an initial pulsed light beam having an initial pulse repetition rate; a pulse repetition rate multiplier, which receives the initial pulsed light beam and produces at least one pulsed light beam having a higher pulse repetition rate than the initial rate. |
申请公布号 |
WO0011766(A1) |
申请公布日期 |
2000.03.02 |
申请号 |
WO1998IL00398 |
申请日期 |
1998.08.20 |
申请人 |
ORBOTECH LTD.;KATZIR, YIGAL;KLING, BORIS;FENSTER, PAUL |
发明人 |
KATZIR, YIGAL;KLING, BORIS;FENSTER, PAUL |
分类号 |
G02B27/10;G03F7/20;H01L21/027;H01S3/00;H01S3/10;H05K3/00 |
主分类号 |
G02B27/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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