SEMICONDUCTOR ELEMENT ISOLATING METHOD AND DEVICE,申请号KR19960016078-传众专利搜索

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发明名称	SEMICONDUCTOR ELEMENT ISOLATING METHOD AND DEVICE
摘要
申请公布号	KR100239234(B1)	申请公布日期	2000.03.02
申请号	KR19960016078	申请日期	1996.05.15
申请人	MITSUBISHI DENKI KABUSHIKI KAISHA	发明人	MODONAMI, KAORU;SIRADAKE, SIKERU;MAZO, HIROSI;YOKOYAMA, YUIJI;MORISAWA, GENJI;GODODA, RIZKO;MURAKAMI, DAKAAKI;HAMAMODO, SADOSI;YASMURA, KENJI;IDO, YASYOSI
分类号	H01L21/316;H01L21/76;H01L21/762;H01L21/8234;(IPC1-7):H01L21/76	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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