发明名称 |
ALUMINUM OXIDE PARTICLES |
摘要 |
A collection of nanoparticles of aluminum oxide having a very narrow distribution of particle diameters are produced by laser pyrolysis. The distribution of particle diameters effectively does not have a tail and almost no particles have a diameter greater than about 4 times the average diameter. The pyrolysis is performed by pyrolyzing a molecular stream containing an aluminum precursor, an oxidizing agent and an infrared absorber.
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申请公布号 |
WO0010920(A1) |
申请公布日期 |
2000.03.02 |
申请号 |
WO1999US18169 |
申请日期 |
1999.08.11 |
申请人 |
NANOGRAM CORPORATION |
发明人 |
KUMAR, SUJEET;REITZ, HARIKLIA, DRIS;BI, XIANGXIN;KAMBE, NOBUYUKI |
分类号 |
B24B37/00;C01F7/02;C01F7/30;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C01G1/02;B24D3/00;C01B13/00 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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