发明名称 ALUMINUM OXIDE PARTICLES
摘要 A collection of nanoparticles of aluminum oxide having a very narrow distribution of particle diameters are produced by laser pyrolysis. The distribution of particle diameters effectively does not have a tail and almost no particles have a diameter greater than about 4 times the average diameter. The pyrolysis is performed by pyrolyzing a molecular stream containing an aluminum precursor, an oxidizing agent and an infrared absorber.
申请公布号 WO0010920(A1) 申请公布日期 2000.03.02
申请号 WO1999US18169 申请日期 1999.08.11
申请人 NANOGRAM CORPORATION 发明人 KUMAR, SUJEET;REITZ, HARIKLIA, DRIS;BI, XIANGXIN;KAMBE, NOBUYUKI
分类号 B24B37/00;C01F7/02;C01F7/30;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C01G1/02;B24D3/00;C01B13/00 主分类号 B24B37/00
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