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发明名称
A METHOD OF FORMING TRENCH ISOLATION OF A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100245561(B1)
申请公布日期
2000.03.02
申请号
KR19970060276
申请日期
1997.11.15
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
YOON, BO UN;JEONG, IN KWON
分类号
H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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SEMICONDUCTOR DEVICE
