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发明名称
Positiv-arbeitende Resistzusammensetzung
摘要
申请公布号
DE69229332(T2)
申请公布日期
2000.03.02
申请号
DE19926029332T
申请日期
1992.12.23
申请人
SUMITOMO CHEMICAL CO., LTD.
发明人
HASHIMOTO, KAZUHIKO;OSAKI, HARUYOSHI;EBINA, CHINEHITO;NAGASE, KYOKO;MORIUMA, HIROSHI;UETANI, YASUNORI
分类号
C08G8/24;G03F7/023;H01L21/027;(IPC1-7):G03F7/023
主分类号
C08G8/24
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