发明名称 |
INTEGRATED SILICON PROFILOMETER AND AFM HEAD |
摘要 |
A topographic head for profilometry and AFM supports a central paddle by coaxial torsion bars projecting inward from an outer frame. A tip projects from the paddle distal from the bars. The torsion bars include an integrated a paddle rotation sensor. A XYZ stage may carry the topographic head for X, Y and Z axis translation. The XYZ stage's fixed outer base is coupled to an X-axis stage via a plurality of flexures. The X-axis stage is coupled to a Y-axis stage also via a plurality of flexures. One of each set of flexures includes a shear stress sensor. A Z-axis stage may also be included to provide an integrated XYZ scanning stage. The topographic head's frame, bars and paddle, and the XYZ stage's stage-base, X-axis, Y-axis and Z-axis stages, and flexures are respectively monolithically fabricated by micromachining from a semiconductor wafer. |
申请公布号 |
EP0868648(A4) |
申请公布日期 |
2000.03.01 |
申请号 |
EP19960943712 |
申请日期 |
1996.12.10 |
申请人 |
XROS,INC. |
发明人 |
NEUKERMANS, ARMAND, P.;SLATER, THIMOTHY, G. |
分类号 |
G01B21/30;G01B7/34;G01Q20/04;G01Q60/38;G01Q70/02 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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