发明名称 |
LIGHT-ABSORBING POLYMERS AND APPLICATION THEREOF TO ANTIREFLECTION FILM |
摘要 |
<p>A high-performance anti-reflective coating which highly absorbs a given light, e.g., deep ultraviolet rays, tenaciously adheres to substrates upon coating formation, is satisfactory in covering, and eliminates the influence of standing waves in the production of integrated circuits; novel light-absorbing polymers for forming the anti-reflective coating; and a process for producing the polymers. One of the polymers is produced by esterifying a copolymer comprising carboxylic anhydride groups and/or dicarboxylic acid groups such as maleic acid as basic recurring units with a hydroxylated aromatic chromophore. The unreacted carboxylic acid groups or acid anhydride groups remaining in the esterified light-absorbing polymer may be amidated and/or imidized with an aminated aromatic compound. Each of these polymers is dissolved in an organic solvent comprising an alcohol, aromatic hydrocarbon, ketone, ester, or combination of these, and the solution is applied to a substrate and then baked to form an anti-reflective coating.</p> |
申请公布号 |
EP0982320(A1) |
申请公布日期 |
2000.03.01 |
申请号 |
EP19990907928 |
申请日期 |
1999.03.15 |
申请人 |
CLARIANT FINANCE (BVI) LIMITED |
发明人 |
KANG, WEN-BING;NISHIWAKI, YOSHINORI;KIMURA, KEN;MATSUO, SHOKO;TANAKA, HATSUYUKI |
分类号 |
H01L21/027;C08F8/14;C08F8/30;C08F8/32;C08F222/02;C08F222/04;C09D5/32;G03F7/09;G03F7/11;(IPC1-7):C08F8/14;C08F220/54;C09D5/00;C08F220/20 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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