| 摘要 |
A semiconductor integrated circuit test system, for testing semiconductor integrated circuit devices includes a test head containing pin electronics circuits and a device handler for receiving semiconductor integrated circuit devices to be tested and delivering the devices to a test station for engagement with the test head. The device handler includes a mechanical support structure, a test head manipulator having a first part rigidly attached to the mechanical support structure, a second part which is movable relative to the first part and to which the test head is attached, and a motor effective between the first and second parts of the manipulator for moving the second part relative to the first part. A power server is attached to the device handler independently of the test head manipulator. A cable connects the power server to the pin electronics circuits of the test head.
|
