| 发明名称 |
High aspect ratio containers for ultrahigh purity chemicals |
| 摘要 |
Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.
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| 申请公布号 |
US6029717(A) |
申请公布日期 |
2000.02.29 |
| 申请号 |
US19960756146 |
申请日期 |
1996.11.29 |
| 申请人 |
ADVANCED DELIVERY & CHEMICAL SYSTEMS, LTD. |
发明人 |
SIEGELE, STEPHEN H.;GREGG, JOHN N.;NOAH, CRAIG M. |
| 分类号 |
B01J4/00;B01L3/08;B67D7/02;B67D7/84;C23C16/44;C23C16/448;F17C1/00;F17C5/00;F17C5/02;F17C5/06;F17C6/00;F17C7/00;F17C9/00;F17C13/02;F17C13/04;G01F23/24;G01F23/26;G01F23/292;G01F23/70;G01F23/72;G01F23/74;G05D9/12;(IPC1-7):F17C13/00 |
主分类号 |
B01J4/00 |
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