发明名称 |
Method for in situ removal of particulate residues resulting from cleaning treatments |
摘要 |
Disclosed is a process for cleaning silicon surfaces of native oxide films. The process utilizes fluorine containing cleaning materials such as anhydrous hydrofluoric acid to clean the oxide from the surface. A fluorine containing particulate matter which forms on the surface as a result of the fluorine containing cleaning materials is then removed by heating the surface to a high temperature. The process is conducted in a non-oxidizing ambient and is preferably conducted in a cluster tool so that the heating step can take place in the same chamber of the cluster tool as later metal deposition step.
|
申请公布号 |
US6029680(A) |
申请公布日期 |
2000.02.29 |
申请号 |
US19980102151 |
申请日期 |
1998.06.22 |
申请人 |
MICRON TECHNOLOGY, INC |
发明人 |
HAWTHORNE, RICHARD C.;LEE, WHONCHEE |
分类号 |
C23C16/02;H01L21/306;(IPC1-7):B05D3/00 |
主分类号 |
C23C16/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|