Recovery of perfluorinated compounds from the exhaust of semiconductor fabs that utilizes membrane and adsorption in series,申请号IL19990129628-传众专利搜索

发明名称	Recovery of perfluorinated compounds from the exhaust of semiconductor fabs that utilizes membrane and adsorption in series
摘要
申请公布号	IL129628(D0)	申请公布日期	2000.02.29
申请号	IL19990129628	申请日期	1999.04.27
申请人	AIR PRODUCTS AND CHEMICALS, INC.	发明人
分类号	B01D;(IPC1-7):B01D	主分类号	B01D
代理机构		代理人
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