TITANIUM SILICIDE TARGET AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a titanium silicide target which can suppress production of particles to an extremely low level and to provide a producing method of the target. SOLUTION: This titanium silicide target has the molar ratio of Si/Ti ranging >=0.3 to <0.6, and the target is preferably prepared to have two kinds of phases of a Ti5Si3 phase and a Ti phase as the inner compsns. The target is obtd. by mixing TiH2 powder and Si powder in the molar ratio Si/Ti ranging >=0.3 to <0.6, heating the mixture to synthesize titanium silicide powder and then sintering it.