Antifuse with a silicide layer overlying a diffusion region

摘要

The large voltage required to program a conventional antifuse is substantially reduced by forming the antifuse with a diffusion region and an overlying layer of silicide. The silicide layer is contacted at opposite ends so that a current can flow in through contacts at one end, and out through contacts at the opposite end. When unprogrammed, a voltage is applied to the semiconductor material in which the diffusion region is formed to prevent the diffusion region to semiconductor material from being forward biased. The antifuse is programmed by heating the silicide layer until the silicide layer agglomerates. The silicide layer can be heated by passing a current through the silicide layer.