摘要 |
A hydrogen sensor including a piezoelectric device with a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered frequency response characteristic, relative to reference conditions of sensor operating corresponding to the frequency response in the absence of hydrogen. The piezoelectric device may be for example a quartz microbalance or a surface acoustic wave device, having a thin film (e.g., 10-100,000 Angstroms thickness) coating thereon of a hydrogen-interactive metal such as palladium, platinum, nickel or the like.
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