发明名称 Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same
摘要 A hydrogen sensor including a piezoelectric device with a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered frequency response characteristic, relative to reference conditions of sensor operating corresponding to the frequency response in the absence of hydrogen. The piezoelectric device may be for example a quartz microbalance or a surface acoustic wave device, having a thin film (e.g., 10-100,000 Angstroms thickness) coating thereon of a hydrogen-interactive metal such as palladium, platinum, nickel or the like.
申请公布号 US6029500(A) 申请公布日期 2000.02.29
申请号 US19980081957 申请日期 1998.05.19
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 TOM, GLENN M.
分类号 G01N27/00;G01N33/00;(IPC1-7):H01L41/08;G01N30/76;G08B17/10 主分类号 G01N27/00
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