| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device which can easily, rapidly and safely attach and remove a top ring. SOLUTION: This polishing device is composed of a top ring 10 for holding a substrate which is therefore opposed to a polishing table, a support shaft 28 tiltably supporting the top ring through the intermediary of a spherical bearing 38, for transmitting a rotational drive power from a drive mechanism through the intermediary of a transmission mechanism 40, the support shaft 38 being composed of a distal end side part including the spherical bearing 38 and the transmission mechanism, a proximal end side part coupled to the transmission mechanism, and a clamp joint 60 provided in the connecting part between both end side parts, for disconnectably connecting between the distal end side part and the proximal end side part. |
