发明名称 Processing compositions and methods of using same
摘要 Compositions and methods for processing (e.g., cleaning) substrates, such as semiconductor-based substrates, as well as processing equipment, include one or more compounds of Formula (I): wherein each R1, R2, R3, and R4 is independently H or an organic group.
申请公布号 US6030491(A) 申请公布日期 2000.02.29
申请号 US19970914509 申请日期 1997.08.19
申请人 MICRON TECHNOLOGY, INC. 发明人 VAARTSTRA, BRIAN A.
分类号 C11D7/26;C11D7/32;C11D11/00;H01L21/306;H01L21/3105;(IPC1-7):H01L21/306;C11D9/04;C11D9/00;B44C1/22 主分类号 C11D7/26
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