| 摘要 |
PURPOSE: A wafer delivery apparatus is provided to place a wafer at a certain position of an arm without additional processes. CONSTITUTION: The apparatus(51) to carry in and out a wafer to a storing part comprises: arm members(52, 53, 54) having a protruded part(52') able to contact with the edge part of a member to be processed on the front end; a shifting tool to reciprocate a wafer between the retrogression position and extension position while supporting the wafer; and an arrangement member(60) to arrange the wafer on a certain position onto the arm member. Herein, the wafer is supported onto the arm member by being close supported by the arrangement member and the protruded part of the arm member, and it can be shifted to other storing part at high speed without being displaced from the certain position.
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