| 摘要 |
PROBLEM TO BE SOLVED: To improve the embeddability in a trench. SOLUTION: A substrate 1 to be treated is set on a stage 2 in a reaction chamber 3 and the stage 2 is rotated at a prescribed rotating speed. In the middle of a reactive gas supplying pipeline 14, a control valve 15 is provided and starts and stops (or controls) the supply of a reactive gas to the reaction chamber 3. A valve controller 21 which controls the valve 15 is constituted of a storing section, valve drive control section, etc. In the storing section, a program in which the supplying pattern of the reactive gas is set is registered for intermittently supplying the reactive gas to the reaction chamber 3 (or repeatedly changing the flow rate of the gas). The valve drive control section controls the valve 15 by sending on/off (or flow rate control) signals to the valve 15 based on the program registered in the storing section.
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