发明名称 EXHAUST GAS PROCESSING METHOD AND DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To enable an exhaust gas processing device to be enhanced in decontamination efficiency, lessened in running cost, lowered in diluting air consumption, and lessened in size by a method wherein exhaust gas processed and exhausted from the outlet of an absorption tower is partially returned to the inlet of the absorption tower. SOLUTION: Exhaust gas processed and exhausted from the outlet of an absorption tower 5 is partially returned to the inlet of the absorption tower 5. That is, the processed exhaust gas is circulated. In detail, a flow of exhaust gas emitted from a manufacturing process is indicated as follows. Exhaust gas is introduced into the base of the absorption tower 5 by an exhaust gas fan 2 through an exhaust gas inlet tube 3, made to ascend up to a tower top passing through a gas/liquid contact part 10, and returned to the base of the absorption tower 5 by a circulation fan 6, and this process is repeatedly carried out, With an increase in times of circulations, a contaminant absorption rate is increased to get a certain equilibrium and can be kept high in contaminant absorption rate. A part of the processed exhaust gas is discharged out into the air as it is through a processed exhaust gas tube 9 or discharged out into the air through an adsorption processor 7 or an ozone decomposer 8 on the discharge side of the circulation fan 6.</p>
申请公布号 JP2000058464(A) 申请公布日期 2000.02.25
申请号 JP19980236589 申请日期 1998.08.07
申请人 KASHIYAMA KOGYO KK 发明人 KATO TOSHIAKI
分类号 B01D53/34;B01D53/77;B01D53/81;H01L21/205;(IPC1-7):H01L21/205 主分类号 B01D53/34
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