COOLING DEVICE FOR MULTI-CHAMBER TYPE HEAT TREATMENT FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a cooling device in which inconvenience state caused by a thermal deformation of a heat shielding plate can be eliminated, a vacuum cooling time or a static gas cooling time can be shortened and then a cooling operation can be carried out from a temperature which is not restricted by a melting point of the material of the heat shielding plate or a cooling gas guiding passage. SOLUTION: There is provided a cooling device arranged at a cooling chamber 4 of a multi-chamber type heat treatment furnace having heating chambers 2, 3 and the cooling chamber 4. The cooling device is comprised of a cooling gas guiding passage 19 into which material 1 to be processed is fed and cooling gas is flowed around it and a cooling fan 22 for circulating the cooling gas passed through the cooling gas guiding passage 19. The cooling gas guiding passage 19 is constituted of a water-cooled panel.