| 摘要 |
PROBLEM TO BE SOLVED: To restrain sticking of reaction by-product and deposit in regions other than a treatment region. SOLUTION: In this thermal treatment method, an object W to be treated is accommodated in a treatment region in a treatment vessel 2 and thermally treated by using specified treating gas at a treating temperature under a treating pressure. In this case, in order to restrain sticking of reaction by-product and deposit in regions other than treatment region in the treatment vessel 2, pressures of the regions except the treatment region are set lower than a treating pressure of the treatment region.
|
