| 摘要 |
PROBLEM TO BE SOLVED: To surely recognize a substrate mark and a stencil mark by arranging a projecting-side polarizing filter and a light receiving-side polarizing filter, and constituting the projecting-side polarizing filter in such a manner as to be rotatable around the optical axis of a light source. SOLUTION: A projecting-side polarizing filter 2k is arranged in a projection route from a lighting means 1k to a substrate B, and a light receiving-side polarizing filter 4k is arranged in a light receiving route from the substrate B to an image pickup means 50k. The projecting-side polarizing filter 2k is rotatable around the optical axis of the light source of the lighting means 1k. Accordingly, the projecting-side polarizing filter 2k can be regulated by rotation so that the difference in brightness between the substrate B and a substrate mark M in a pickup image, or the contrast is the best. Accordingly, the substrate mark M can be recognized to set the substrate B in an optimum position. A stencil mark MS can be also surely confirmed, and the relative position of the substrate B to a stencil BS can be set in an optimum position. |
