| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer mechanism which can quickly and stably take out a plurality of substrates at once from a box carrier without contaminating the rear surfaces of the substrates, transport the substrates to and from a cleaning bath, etc., and again house the substrates in the box carrier. SOLUTION: A first transfer means 5 simultaneously transfer a plurality of substrates 1 between a rotary jig 25 and a box carrier in a nearly horizontal plane, while the means 5 holds the plural substrates 1. The jig 25 can house a plurality of substrates and can be turned to a nearly vertical direction from a nearly horizontal direction or to the nearly horizontal direction from the nearly vertical direction by means of a turning means 25a. A second transfer means can ascend to a position above the top opening 25b of the jig 25 and can receive and deliver the substrates at once from and to the opening 25b, when the jig 25 is directed toward the vertical direction. |
