| 摘要 |
PROBLEM TO BE SOLVED: To correct the extracting direction of a beam in a simple structure, and extract a beam of a high current density. SOLUTION: A negative ion beam deflected in one direction with an electronically deflected magnetic field C passes through beam extracting holes 9 in an electron restraining electrode 7 and an earth electron 8 at the remained deflection angle, but a beam orbit modification magnet 12 is installed at a beam outlet portion downstream of the earth electrode 8. When the negative ion beam 10 passes between pole pieces at both ends of the beam orbit modification magnet, the magnetic force corrects deflection of the negative ion beam 10, the negative ion beam 10 is returned to the straight progression, and therefore the negative ion beam 10 can be projected to a desired position.
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