METHOD FOR DEPOSITING FILM

摘要

PROBLEM TO BE SOLVED: To obtain a high quality metal plating film having a large crystal grain size. SOLUTION: The method for depositing a film comprises a step for forming a first underlying part 12 of metal film having continuity on a substrate 11 to be processed, a step for forming a second underlying part 13 having discontinuity at least partially on the first underlying part using a metallic material, and a step for forming a metal plating film 14 on the substrate 11 to be processed where first and second underlying parts are formed.