THIN FILM TRANSISTOR AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To form a semiconductor film having uniform film quality. SOLUTION: A semiconductor film having uniform film quality is formed by a first process where the semiconductor film is formed on a substrate 100; a second process where a laser beam whose total energy is not less than 5J and whose pulse width is not less than 100 nsec is radiated for one shot or a plurality of shots, and a high crystallized semiconductor film is formed, and a third process where the relative position of the semiconductor film and the laser beam is changed and the second process is repeated in a part different from a part of the semiconductor film. A thin film transistor having the semiconductor film and an active layer has a high characteristic without dispersion.