CHEMICAL SUBSTANCE GENERATOR CONTROLLING MIXING AND CONCENTRATING FEEDBACK AND REGULATION METHOD THEREOF

摘要

PURPOSE: A mixing device is provided to generate a chemical compound of the high degree of purity by passing the rotation, the purification, and the detection of the chemical material between a mixing container and a storing container of the chemical material of the high degree of purity. CONSTITUTION: The chemical generator comprises: a mixing container having a first entrance to accept a first chemical material of the high degree of the purity, a second entrance to accept a second chemical material of the high degree of the purity, and a first outlet to separate the chemical compound of the high degree of purity of the first and the second chemical materials of the high degree of the purity; a first supply resource of the first chemical material of the high degree of the purity connected with the first entrance of the mixing container, and having a first valve to control to induce the first chemical material of the high degree of the purity into the container; and a second supply resource of the second chemical material of the high degree of the purity having a second valve.