| 摘要 |
PROBLEM TO BE SOLVED: To perform high speed and high resolution access. SOLUTION: This device is provided with a suspension 5 for a rough operation supported by a first supporting part 4 extended from a fixed part 3 fixed to a main body frame, suspension 7 for a fine operation supported by a second supporting part 6 extended from the suspension 5 for the rough operation, head part 9 formed on the side face of a head slider 8 fixed to the suspension 7 for the fine operation, driving part 10 arranged at the lower parts of the suspensions 5 and 7, seek following control part 11, and power source 12. Short beam parts for the fine operation are bi-directionally formed on a first driving part 110 for the fine operation, and piezoelectric elements are adhered to the back side. Also, beam parts for the rough operation are bi-directionally formed on a second driving part 120 for the rough operation, and piezoelectric elements are adhered to the back side. The suspension 7 for the fine operation is driven by vibrating the beam parts for the fine operation, and the suspension 5 for the rough operation is driven by vibrating the beam parts for the rough operation.
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