| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting a scratch of an object caused by malfunction of a robot, etc., when the object is moved by a robot arm. SOLUTION: This method includes a stage for providing the robot arm 1 which grips and mounts the object in a cassette 7 and a stage for providing the cassette having an entrance part for accepting the object. A vibration sensor 9 is placed at least one place on the robot arm or beneath the cassette and the robot arm is controlled according to at least one malfunction display of the vibration sensor. An air flow crossing the entrance part of the cassette is generated and a particulate counter can be provided at the downstream end part of the air flow; and the robot arm 1 is controlled according to the malfunction display of at least one of the vibration sensor 9 and particulate counter. |
