| 摘要 |
PROBLEM TO BE SOLVED: To enable making distribution of film thickness markedly uniform as compared with the conventional case, when high frequency power is supplied by supplying power to an electrode with a multipoint power supplying system. SOLUTION: An anode electrode 23 which involves a heater and retains a substrate 29, and a plurality of cathode electrodes 22a-22h which are arranged facing the anode electrode 23 are installed, and a multipoint power supplying system is realized by supplying electric power to the respective cathode electrodes 22a-22h via a power distributor 60 or the like. High frequency power, whose frequency is at least 30 MHz and at most 200 MHz, is supplied from a high frequency power source 24 and glow discharge is generated with the supplied power. Thereby an amorphous thin film or a fine crystal thin film or a polycrystalline thin film is formed on the surface of the substrate 29. |
