发明名称 MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device which permits the number of times of mask use to be reduced by one. SOLUTION: Using a first mask 2, a second conductivity-type buried well 3 is formed, and a second conductivity-type impurity ion for determining the threshold of the transistor of a memory cell is implanted in a memory cell part 1. Using a second mask 9, a first conductivity-type wells 10, 10 are formed respectively at the memory cell part 1 and a second conductivity-type MOS transistor part 8. Using the second mask 9, an n+ diffused layer 11 and n+ diffused layer 14 are formed for determining the threshold of the transistor.
申请公布号 JP2000058676(A) 申请公布日期 2000.02.25
申请号 JP19980221554 申请日期 1998.08.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 OTOI HISAKAZU;KOGA TAKESHI
分类号 H01L27/11;H01L21/8244;H01L27/10 主分类号 H01L27/11
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